Articles citing this article

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Cited article:

A technique for evaluating the RF voltage across the electrodes of a capacitively-coupled plasma reactor

V. Lisovskiy, J.-P. Booth, K. Landry, D. Douai, V. Cassagne, V. Yegorenkov

Eur. Phys. J. Appl. Phys., 36 2 (2006) 177-182

Published online: 2006-10-11

DOI: https://doi.org/10.1051/epjap:2006116

This article has been cited by the following article(s):

Radio frequency breakdown between structured parallel plate electrodes with a millimetric gap in low pressure gases

B. Legradic, A. A. Howling and C. Hollenstein
Physics of Plasmas 17 (10) (2010)
https://doi.org/10.1063/1.3490190