Articles citing this article

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Cited article:

Control and monitoring of optical thin films deposition in a Matrix Distributed Electron Cyclotron Resonance reactor

D. Daineka, D. Kouznetsov, P. Bulkin, G. Girard, J.-E. Bourée, B. Drévillon

Eur. Phys. J. Appl. Phys., 28 3 (2004) 343-346

Published online: 2004-11-23

DOI: https://doi.org/10.1051/epjap:2004198

This article has been cited by the following article(s):

Multi-dipolar microwave plasmas and their application to negative ion production

S. Béchu, A. Soum-Glaude, A. Bès, A. Lacoste, P. Svarnas, S. Aleiferis, A. A. Ivanov and M. Bacal
Physics of Plasmas 20 (10) (2013)
https://doi.org/10.1063/1.4823466

Maria Losurdo, April S. Brown and Giovanni Bruno
453 (2013)
https://doi.org/10.1007/978-3-642-33956-1_13