Articles citing this article

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Cited article:

Investigation of silicon oxynitride and amorphous silicon multilayers

M. Serenyi, C. Frigeri

Eur. Phys. J. Appl. Phys., 27 1-3 (2004) 329-332

Published online: 2004-07-15

DOI: https://doi.org/10.1051/epjap:2004119-5

This article has been cited by the following article(s):

Comparative analysis of amorphous silicon and silicon nitride multilayer by spectroscopic ellipsometry and transmission electron microscopy

M. Serenyi, T. Lohner, P. Petrik and C. Frigeri
Thin Solid Films 515 (7-8) 3559 (2007)
https://doi.org/10.1016/j.tsf.2006.10.137