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Cited article:

Two-dimensional modelling of CH₄-H₂ radio-frequency discharges for a-C:H deposition

O. Leroy, H. Videlot, J. Jolly

Eur. Phys. J. AP, 16 2 (2001) 121-130

Published online: 2001-11-15

DOI: https://doi.org/10.1051/epjap:2001201

This article has been cited by the following article(s):

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Surface and Coatings Technology 254 73 (2014)
https://doi.org/10.1016/j.surfcoat.2014.05.066

Influence of the power on the particles generated in a low pressure radio frequency nitrogen-rich methane discharge

Véronique Massereau-Guilbaud, Jérémy Pereira, Isabelle Géraud-Grenier and André Plain
Journal of Applied Physics 105 (3) 033302 (2009)
https://doi.org/10.1063/1.3072664