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Optical emission spectroscopy of vanadium cathodic arc plasma at different nitrogen pressure
Yu. V. Kovtun, A. S. Kuprin, A. N. Shapoval, S. A. Leonov, R. L. Vasilenko and Yu. A. Besedina Journal of Applied Physics 134(24) (2023) https://doi.org/10.1063/5.0177931
Diagnostics of Argon Plasma Using Reliable Electron-Impact Excitation Cross Sections of Ar and Ar+
J. C. Reardon, A. F. Almagri, N. Christensen, D. A. Endrizzi, C. B. Forest, S. Gallogly, A. Lambert, S. Malewicz, J. Milhone, P. D. Nonn, M. D. Nornberg, S. P. Oliva and C. Purcell American Journal of Physics 88(8) 670 (2020) https://doi.org/10.1119/10.0001318
Beam Plasma Characteristics of a Helicon Plasma Source Measured by a Spatially Resolved Optical Emission Spectroscope
Influence of argon fraction on plasma parameters in H2-N2mixture discharge with cathodic cage
Muhammad Naeem, Mujahid Zaka-ul-Islam, Zahid Iqbal Khattak, Muhammad Shafiq and Muhammad Zakaullah The European Physical Journal Applied Physics 77(1) 10801 (2017) https://doi.org/10.1051/epjap/2016160280
A hybrid electron cyclotron resonance metal ion source with integrated sputter magnetron for the production of an intense Al+ ion beam
T. Weichsel, U. Hartung, T. Kopte, G. Zschornack, M. Kreller and A. Philipp Review of Scientific Instruments 86(9) (2015) https://doi.org/10.1063/1.4929517
Investigation of plasma parameters in an active screen cage-pulsed dc plasma used for plasma nitriding
An inverted cylindrical sputter magnetron as metal vapor supply for electron cyclotron resonance ion sources
T. Weichsel, U. Hartung, T. Kopte, G. Zschornack, M. Kreller and A. Silze Review of Scientific Instruments 85(5) (2014) https://doi.org/10.1063/1.4872381
Plasma parameter investigation during plasma-enhanced chemical vapor deposition of silicon-containing diamond-like carbon films
Determination of Non-Maxwellian Electron Energy Distributions in Low-Pressure Plasmas by Using the Optical Emission Spectroscopy and a Collisional-Radiative Model
Optical emission spectroscopy in low-temperature plasmas containing argon and nitrogen: determination of the electron temperature and density by the line-ratio method
