Pulsed laser deposition of c-axis oriented aluminum nitride thin films on silicon
Eur. Phys. J. AP, 14 2 (2001) 115-119
Published online: 2001-05-15
Articles citing this article
The Citing articles tool gives a list of articles citing the current article.
The citing articles come from EDP Sciences database, as well as other publishers participating in CrossRef Cited-by Linking Program. You can set up your personal account to receive an email alert each time this article is cited by a new article (see the menu on the right-hand side of the abstract page).
Cited article:
This article has been cited by the following article(s):
Piezoelectric aluminum nitride thin films for CMOS compatible MEMS: Sputter deposition and doping
S. Sandeep, Rui M. R. Pinto, Jyothilakshmi Rudresh, Ved Gund, Kodihalli K. Nagaraja and K. B. VinayakumarCritical Reviews in Solid State and Materials Sciences 50 (2) 161 (2025)
https://doi.org/10.1080/10408436.2024.2406247
Progress in Materials Used for Solidly Mounted Film Bulk Acoustic Resonators
Gang LIU, Jia-Qi ZHU, Sai WANG, et al.Journal of Inorganic Materials 25 (12) 1233 (2011)
https://doi.org/10.3724/SP.J.1077.2010.01233
Piezoelectric MEMS sensors: state-of-the-art and perspectives
S Tadigadapa and K MatetiMeasurement Science and Technology 20 (9) 092001 (2009)
https://doi.org/10.1088/0957-0233/20/9/092001
Correlations between optical properties, microstructure, and processing conditions of Aluminum nitride thin films fabricated by pulsed laser deposition
Jonghoon Baek, James Ma, Michael F. Becker, John W. Keto and Desiderio KovarThin Solid Films 515 (18) 7096 (2007)
https://doi.org/10.1016/j.tsf.2007.03.003
Epitaxial growth of Sc[sub 2]O[sub 3] films on GaN (0001) by pulsed laser deposition
Chang Liu, Eng Fong Chor, Leng Seow Tan and Anyan DuJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 25 (3) 754 (2007)
https://doi.org/10.1116/1.2731332