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Cited article:

Plasma chemistry and dust-particle generation in pure methane plasma: Influence of the RF electrode cleanliness

I. Géraud-Grenier, M. Mikikian, F. Faubert and V. Massereau-Guilbaud
Journal of Applied Physics 126 (6) (2019)
https://doi.org/10.1063/1.5099326

Optical diagnostic and electrical analysis in dusty RF discharges containing plasmoids

J. F. Lagrange, I. Géraud-Grenier, F. Faubert and V. Massereau-Guilbaud
Journal of Applied Physics 118 (16) (2015)
https://doi.org/10.1063/1.4934249

Particle Movement in a Dusty RF Plasma at Power Switch-OFF

Jean-Francois Lagrange, Isabelle Geraud-Grenier, Francois Faubert and Veronique Massereau-Guilbaud
IEEE Transactions on Plasma Science 42 (10) 2674 (2014)
https://doi.org/10.1109/TPS.2014.2342884

Electron Temperature Evolution in a Low-Pressure Dusty RF Nitrogen-Rich Methane Plasma

V. Massereau-Guilbaud, I. Geraud-Grenier, J. Lagrange, H. Tawidian and M. Mikikian
IEEE Transactions on Plasma Science 41 (4) 816 (2013)
https://doi.org/10.1109/TPS.2013.2252025

Particle Collecting in a 13.56-MHz Radio-Frequency Methane Discharge

Véronique Massereau-Guilbaud, Isabelle Geraud-Grenier and André Plain
IEEE Transactions on Plasma Science 39 (11) 2756 (2011)
https://doi.org/10.1109/TPS.2011.2159026

Influence of the power on the particles generated in a low pressure radio frequency nitrogen-rich methane discharge

Véronique Massereau-Guilbaud, Jérémy Pereira, Isabelle Géraud-Grenier and André Plain
Journal of Applied Physics 105 (3) (2009)
https://doi.org/10.1063/1.3072664

Determination of the electron temperature by optical emission spectroscopy in a 13.56 MHz dusty methane plasma: Influence of the power

Véronique Massereau-Guilbaud, Isabelle Géraud-Grenier and André Plain
Journal of Applied Physics 106 (11) (2009)
https://doi.org/10.1063/1.3267292

Optical properties of carbonaceous nanoparticles produced in sputtering discharges

A. Zeinert, C. Arnas, C. Dominique and A. Mouberi
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 26 (6) 1450 (2008)
https://doi.org/10.1116/1.2987950

Nitrogen effect on the dust presence and behavior in a radio frequency CH4∕N2 discharge

Jérémy Péreira, Véronique Massereau-Guilbaud, Isabelle Géraud-Grenier and André Plain
Journal of Applied Physics 103 (3) (2008)
https://doi.org/10.1063/1.2829782

Plasma diagnostics in silane–methane–hydrogen plasmas under pm-Si1−xCx:H deposition conditions: Correlation with film properties

V. Suendo and P. Roca i Cabarrocas
Journal of Non-Crystalline Solids 352 (9-20) 959 (2006)
https://doi.org/10.1016/j.jnoncrysol.2005.12.052

Characterization of hydrogenated amorphous carbon nitride particles and coatings obtained in a CH4/N2 radiofrequency discharge

Jérémy Pereira, Isabelle Géraud-Grenier, Véronique Massereau-Guilbaud and André Plain
Thin Solid Films 482 (1-2) 226 (2005)
https://doi.org/10.1016/j.tsf.2004.11.150

CH and CN Radical Contribution in the Particle Formation Generated in a Radio‐Frequency CH4/N2 Plasma

Jérémy Pereira, Véronique Massereau‐Guilbaud, Isabelle Géraud‐Grenier and André Plain
Plasma Processes and Polymers 2 (8) 633 (2005)
https://doi.org/10.1002/ppap.200500014

Characterization of particulates and coatings created in a 13.56 MHz radiofrequency methane plasma

Isabelle Géraud-Grenier, Véronique Massereau-Guilbaud and André Plain
Surface and Coatings Technology 187 (2-3) 336 (2004)
https://doi.org/10.1016/j.surfcoat.2004.01.043

Dust particle formation in low pressure Ar/CH4 and Ar/C2H2 discharges used for thin film deposition

J Berndt, S Hong, E Kovačević, I Stefanović and J Winter
Vacuum 71 (3) 377 (2003)
https://doi.org/10.1016/S0042-207X(02)00767-4

Growth precursors and dynamics of dust particle formation in the Ar/CH4and Ar/C2H2plasmas

S Hong, J Berndt and J Winter
Plasma Sources Science and Technology 12 (1) 46 (2003)
https://doi.org/10.1088/0963-0252/12/1/306

Particulate growth in a 13.56 MHz radiofrequency methane plasma: influence of the flow rate and the incident rf power

I. Géraud-Grenier, V. Massereau-Guilbaud and A. Plain
The European Physical Journal Applied Physics 14 (3) 187 (2001)
https://doi.org/10.1051/epjap:2001158

Influence of particulates generated in a CH4low pressure radiofrequency discharge on dc negative self bias voltage

V. Massereau-Guilbaud, I. Géraud-Grenier and A. Plain
The European Physical Journal Applied Physics 11 (1) 71 (2000)
https://doi.org/10.1051/epjap:2000146