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Cited article:

Modelling of low-temperature/large-area distributed antenna array microwave-plasma reactor used for nanocrystalline diamond deposition

Fabien Bénédic, Benoit Baudrillart, Jocelyn Achard

Eur. Phys. J. Appl. Phys., 81 1 (2018) 10804

Published online: 2018-02-27

DOI: https://doi.org/10.1051/epjap/2017170238

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Effect of the admixture of N2to low pressure, low temperature H2-CH4-CO2microwave plasmas used for large area deposition of nanocrystalline diamond films

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