Modelling of low-temperature/large-area distributed antenna array microwave-plasma reactor used for nanocrystalline diamond deposition
Eur. Phys. J. Appl. Phys., 81 1 (2018) 10804
Published online: 2018-02-27
Articles citing this article
The Citing articles tool gives a list of articles citing the current article.
The citing articles come from EDP Sciences database, as well as other publishers participating in CrossRef Cited-by Linking Program. You can set up your personal account to receive an email alert each time this article is cited by a new article (see the menu on the right-hand side of the abstract page).
Cited article:
This article has been cited by the following article(s):
Study of effects of fractal apertures on diamond growth
Katharina Hauer, Swayamprakash Sahoo, Johannes Fiedler and Justas ZalieckasDiamond and Related Materials 155 112281 (2025)
https://doi.org/10.1016/j.diamond.2025.112281
Diamond (111) homoepitaxy via hot-filament chemical vapor deposition: Growth mode, transition metal incorporation, and twin formation
Kimiyoshi Ichikawa, Kazuki Kobayashi, Tsubasa Matsumoto, Kan Hayashi, Takao Inokuma, Christoph E. Nebel, Satoshi Yamasaki and Norio TokudaDiamond and Related Materials 160 112990 (2025)
https://doi.org/10.1016/j.diamond.2025.112990
Effect of the admixture of N2 to low pressure, low temperature H2-CH4-CO2 microwave plasmas used for large area deposition of nanocrystalline diamond films
D Dekkar, A Puth, E Bisceglia, P W P Moreira, A V Pipa, G Lombardi, J Röpcke, J H van Helden and F BénédicJournal of Physics D: Applied Physics 53 (45) 455204 (2020)
https://doi.org/10.1088/1361-6463/aba7df
Investigation of a distributed antenna array microwave system for the three-dimensional low-temperature growth of nanocrystalline diamond films
D. Dekkar, F. Bénédic, C. Falentin-Daudré, O. Brinza, R. Issaoui and J. AchardDiamond and Related Materials 94 28 (2019)
https://doi.org/10.1016/j.diamond.2019.02.016