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Cited article:

MEMS blazed gratings fabricated using anisotropic etching and oxidation sharpening

Qiuyu Nie, Yiyuan Xie and Fei Chang
AIP Advances 10 (6) (2020)
https://doi.org/10.1063/5.0004903

Miniaturized NIR Spectrometer Based on Novel MOEMS Scanning Tilted Grating

Jian Huang, Quan Wen, Qiuyu Nie, Fei Chang, Ying Zhou and Zhiyu Wen
Micromachines 9 (10) 478 (2018)
https://doi.org/10.3390/mi9100478