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Cited article:

Control of crystalline volume and nano crystal grain size in nanocrystalline silicon thin film deposited by PECVD

Thanh Tung Bui, Mau Chien Dang

Eur. Phys. J. Appl. Phys., 68 2 (2014) 20303

Published online: 2014-11-18

DOI: https://doi.org/10.1051/epjap/2014140364

This article has been cited by the following article(s):

The effect of ultrasmall grain sizes on the thermal conductivity of nanocrystalline silicon thin films

Battogtokh Jugdersuren, Brian T. Kearney, James C. Culbertson, et al.
Communications Physics 4 (1) (2021)
https://doi.org/10.1038/s42005-021-00662-9