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Cited article:

Effects of substrates on the crystal structure, texturing and optical properties of AlN coatings deposited by inverted cylindrical magnetron sputtering

A. Khanna, D.G. Bhat

Eur. Phys. J. Appl. Phys., 59 3 (2012) 30301

Published online: 2012-10-08

DOI: https://doi.org/10.1051/epjap/2012120203

This article has been cited by the following article(s):

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Response of structural and optical properties against proton irradiation in AlN:Tm thin films

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Radiation Physics and Chemistry 180 109234 (2021)
https://doi.org/10.1016/j.radphyschem.2020.109234