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Cited article:

Correlations of plasma parameters and properties of magnetron sputtered TiN films

N. Kumari, P.S. Das, N.K. Joshi, P.K. Barhai

Eur. Phys. J. Appl. Phys., 59 2 (2012) 20302

Published online: 2012-09-03

DOI: https://doi.org/10.1051/epjap/2012120108

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