Solar blind AlGaN photodetectors with a very high spectral selectivity

Issue		Eur. Phys. J. Appl. Phys. Volume 33, Number 1, January 2006


Page(s)		5 - 7
Section		Microelectronics and Optoelectronics
DOI		10.1051/epjap:2006002
Published online		18 January 2006

Eur. Phys. J. Appl. Phys. 33, 5-7 (2006)
DOI: 10.1051/epjap:2006002

Solar blind AlGaN photodetectors with a very high spectral selectivity

J.-Y. Duboz¹, N. Grandjean¹, A. Dussaigne¹, M. Mosca², J.-L. Reverchon², P.G. Verly³ and R.H. Simpson³

¹ CRHEA, CNRS, rue Bernard Gregory, Sophia Antipolis, 06560 Valbonne, France
² THALES Research and Technology, Domaine de Corbeville, 91404 Orsay Cedex, France
³ Institute for Microstructural sciences, National Research Council, Ottawa K1A 0R6, Ontario, Canada

jyd@crhea.cnrs.fr

(Received: 23 March 2005 / Received in final form: 19 August 2005 / Accepted: 29 September 2005 / Published online: 18 January 2006)

Abstract
Solar blind detectors based on AlGaN heterostructures grown on sapphire by Molecular Beam Epitaxy and with a dielectric interference filter deposited on the back side are demonstrated to provide record spectral selectivity. Rejection ratios of $2\times 10^{4}$ , and better than 5 $\times$ 10⁴, measured between 280 and 320 nm, are achieved in Metal Semiconductor Metal detectors and Schottky diodes respectively. The whole detector process is fully compatible with low cost array fabrication.

PACS
85.60.Gz - Photodetectors (including infrared and CCD detectors).
78.20.-e - Optical properties of bulk materials and thin films.
73.40.Sx - Metal-semiconductor-metal structures.

© EDP Sciences 2006

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