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Issue Eur. Phys. J. Appl. Phys.
Volume 15, Number 2, August 2001
Page(s) 117 - 121
Section Nano and Micro Electronics,\ Microsystems and Devices
DOI 10.1051/epjap:2001103

DOI: 10.1051/epjap:2001103

Eur. Phys. J. AP 15, 117-121 (2001)

Simulation of 2D quantum effects in ultra-short channel MOSFETs by a finite element method

A. Poncet, C. Faugeras and M. Mouis

Laboratoire de Physique de la Matière (UMR-CNRS 5511) , INSA-Lyon, 20 avenue Albert Einstein, 69621 Villeurbanne, France

poncet@lpm.insa-lyon.fr

(Received: 20 November 2000 / Revised: 18 April 2001 / Accepted: 27 April 2001 )

Abstract
This paper presents a flexible numerical technique which is especially suited to analyze lateral modulation of quantum effects in short channel MOS transistors. We discuss boundary conditions for the Schr $\ddot{\rm o}$dinger equation and the impact of the finite element meshing. We show how channel length shortening alters the sub-band structure, thus giving an evaluation of the limits of a 1D quantum approach.

PACS
85.30.De - Semiconductor-device characterization, design, and modeling.
02.70.Dh - Finite-element and Galerkin methods.


© EDP Sciences 2001


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