Issue Eur. Phys. J. Appl. Phys. Volume 47, Number 2, August 2009 11th International Symposium on High Pressure, Low Temperature Plasma Chemistry (HAKONE XI) Article Number 22815 Number of page(s) 4 Section 11th International Symposium on High Pressure, Low Temperature Plasma Chemistry (HAKONE XI) DOI 10.1051/epjap/2009062 Published online 17 April 2009

Eur. Phys. J. Appl. Phys. 47, 22815 (2009)
DOI: 10.1051/epjap/2009062

Electron beam induced light emission

A. Ulrich¹, T. Heindl¹, R. Krücken¹, A. Morozov¹, C. Skrobol¹ and J. Wieser<sup>2

1</sup>  Physik Department E12, Technische Universität München, James-Franck-Str. 1, 85748 Garching, Germany
²  Coherent GmbH, Zielstatt-Str. 32, 81379 München, Germany

andreas.ulrich@ph.tum.de

Received: 11 December 2008 / Accepted: 21 January 2009 / Published online: 17 April 2009

Abstract
Electron beams with a particle energy of typically 12 keV are used for collisional excitation of dense gases. The electrons are sent through ceramic membranes of only 300 nm thickness into gas targets. Excimer light emission from the pure rare gases and from gas mixtures are studied for the development of brilliant VUV and UV light sources. The application of the technology for gas kinetic studies is described and its potential for building very small electron beam pumped lasers is discussed.

PACS
42.55.Lt - Gas lasers including excimer and metal-vapor lasers.
34.50.Fa - Electronic excitation and ionization of atoms.
33.20.Ni - Vacuum ultraviolet spectra.

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