Issue Eur. Phys. J. Appl. Phys. Volume 47, Number 1, July 2009 4th Colloquium Interdisciplinary in Instrumentation (C2I) Article Number 12702 Number of page(s) 5 Section 4th Colloquium Interdisciplinary in Instrumentation (C2I 2007) DOI 10.1051/epjap/2009060 Published online 22 April 2009

Eur. Phys. J. Appl. Phys. 47, 12702 (2009)
DOI: 10.1051/epjap/2009060

PANI/ZnO/Quartz structure for Love wave gas sensor

F. Moreira¹, F. Sarry¹, D. Nicolas-Debarnot², O. Elmazria¹ and F. Poncin-Epaillard<sup>2

1</sup>  IJL/P2M, Nancy University, Vandœuvre-lès-Nancy, France
²  LPCI, Université du Maine, Le Mans, France

frederic.sarry@lpmi.uhp-nancy.fr

Received: 30 May 2008 / Accepted: 19 January 2009 / Published online: 22 April 2009

Abstract
Everyone knows the importance of sensors in our society and the huge attempt to improve their properties in order to obtain better sensitivity and selectivity. In this paper, we are more particularly focused on gas sensors based on surface acoustic waves (SAW) device. In a previous work, we have developed and studied a structure composed of a 90° rotated ST quartz crystal covered with a ZnO layer. By developing inter-digital transducers (IDT) on this structure, we can generate different types of acoustic waves. Love waves which are confined near the surface are known to be very sensitives to fluids (liquids or gases). The aim of this work is to present the way we have developed this optimal structure and to test it with a specific polymer. This polymer is polyaniline (PANI). Its main advantage is that it should be deposited by cold pulsed plasma process.

PACS
43.35.Ns - Acoustical properties of thin films.
43.38.Fx - Piezoelectric and ferroelectric transducers.
82.35.Lr - Physical properties of polymers.

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