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Eur. Phys. J. Appl. Phys. 47, 11001 (2009)
DOI: 10.1051/epjap/2009104
Comment on “Diagnostics of 13.56 MHz RF sustained Ar-N2 plasma by optical emission spectroscopy" by F.U. Khan, N.U. Rehman, S. Naseer, M.A. Naveed, A. Qayyum, N.A.D. Khattak and M. Zakaullah
N. Sadeghi1, 2 and F.J. Gordillo-Vazquez31 Laboratoire de Spectrométrie Physique, Université Joseph Fourier and CNRS, BP 87, 38402 Saint Martin d'Hères, France
2 Laboratoire des Technologies de la Microélectronique, CNRS, 17 rue des Martyrs, 38054 Grenoble Cedex 09, France
3 Instituto de Astrofísica de Andalucia, CSIC, P.O. Box 3004, 18080 Granada, Spain
Nader.Sadeghi@ujf-grenoble.fr
Received: 9 March 2009 / Accepted: 24 april 2009 / Published online: 5 June 2009
Abstract
Several important errors and misinterpretations present in a recent publication by Khan et al. [Eur. Phys. J. Appl. Phys. 45, 11002 (2009)] are pointed out and discussed. In particular, it is shown that the method used to calculate the rate coefficients for the electron impact excitation of 3p54p and 3p55p states of argon is incorrect and leads to unrealistically high rate coefficients.
52.70.Kz - Optical (ultraviolet, visible, infrared) measurements.
© EDP Sciences 2009
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