Issue Eur. Phys. J. Appl. Phys. Volume 46, Number 1, April 2009 International Symposium on Flexible Organic Electronics (IS-FOE) Article Number 12506 Number of page(s) 4 Section Topical Issue International Symposium on Flexible Organic Electronics (IS-FOE) DOI 10.1051/epjap/2009028 Published online 27 March 2009

Eur. Phys. J. Appl. Phys. 46, 12506 (2009)
DOI: 10.1051/epjap/2009028

OVPD technology

N. Meyer¹, M. Rusu², S. Wiesner², S. Hartmann³, D. Keiper¹, M. Schwambera¹, M. Gersdorff¹, M. Kunat¹, M. Heuken¹, W. Kowalsky³ and M.Ch. Lux-Steiner<sup>2

1</sup>  AIXTRON AG, Kackertstr. 15-17, 52072 Aachen, Germany
²  Solarenergieforschung (SE2), Helmholtz-Zentrum Berlin für Materialien und Energie, Germany
³  TU Braunschweig, Schleinitzstraße 22, 38106 Braunschweig, Germany

Meyer@aixtron.com

Received: 20 October 2008 / Accepted: 23 January 2009 / Published online: 27 March 2009

Abstract
The precise control of organic thin film processing by organic vapor phase deposition (OVPD) is presented and analyzed on device level. OVPD offers accurate and individual control of deposition layer properties like mixing of several materials (co-deposition) and the control of various morphologies by a wide process parameter space given by, e.g. substrate temperature, deposition rate and pressure. The benefit of precise co-deposition is demonstrated by an OLED with a sensitive twofold-doped emissive layer and revealed a doping level of 0.26% for the red dopant with a std. dev. of 0.38%. The effect of the various morphologies is investigated by optimizing the efficiency of molecular organic solar cells consisting of copper phthalocyanine (CuPc) and C₆₀. With defined process parameters efficiencies of up to 3.0% were demonstrated.

PACS
78.66.Qn - Polymers; organic compounds.
84.60.Jt - Photoelectric conversion: solar cells and arrays.
72.80.Le - Polymers; organic compounds.

© EDP Sciences 2009

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