Comment on “Diagnostics of 13.56 MHz RF sustained Ar-N2 plasma by optical emission spectroscopy" by F.U. Khan, N.U. Rehman, S. Naseer, M.A. Naveed, A. Qayyum, N.A.D. Khattak and M. Zakaullah

Issue		Eur. Phys. J. Appl. Phys. Volume 47, Number 1, July 2009 4th Colloquium Interdisciplinary in Instrumentation (C2I)


Article Number		11001
Number of page(s)		3
Section		Plasma, Discharges and Processes
DOI		10.1051/epjap/2009104
Published online		05 June 2009

Eur. Phys. J. Appl. Phys. 47, 11001 (2009)
DOI: 10.1051/epjap/2009104

Comment on “Diagnostics of 13.56 MHz RF sustained Ar-N₂ plasma by optical emission spectroscopy" by F.U. Khan, N.U. Rehman, S. Naseer, M.A. Naveed, A. Qayyum, N.A.D. Khattak and M. Zakaullah

N. Sadeghi^{1, 2} and F.J. Gordillo-Vazquez³

¹ Laboratoire de Spectrométrie Physique, Université Joseph Fourier and CNRS, BP 87, 38402 Saint Martin d'Hères, France
² Laboratoire des Technologies de la Microélectronique, CNRS, 17 rue des Martyrs, 38054 Grenoble Cedex 09, France
³ Instituto de Astrofísica de Andalucia, CSIC, P.O. Box 3004, 18080 Granada, Spain

Nader.Sadeghi@ujf-grenoble.fr

Received: 9 March 2009 / Accepted: 24 april 2009 / Published online: 5 June 2009

Abstract
Several important errors and misinterpretations present in a recent publication by Khan et al. [Eur. Phys. J. Appl. Phys. 45, 11002 (2009)] are pointed out and discussed. In particular, it is shown that the method used to calculate the rate coefficients for the electron impact excitation of 3p⁵4p and 3p⁵5p states of argon is incorrect and leads to unrealistically high rate coefficients.

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