Electron beam induced light emission

Issue		Eur. Phys. J. Appl. Phys. Volume 47, Number 2, August 2009 11th International Symposium on High Pressure, Low Temperature Plasma Chemistry (HAKONE XI)


Article Number		22815
Number of page(s)		4
Section		11th International Symposium on High Pressure, Low Temperature Plasma Chemistry (HAKONE XI)
DOI		10.1051/epjap/2009062
Published online		17 April 2009

Eur. Phys. J. Appl. Phys. 47, 22815 (2009)
DOI: 10.1051/epjap/2009062

A. Ulrich¹, T. Heindl¹, R. Krücken¹, A. Morozov¹, C. Skrobol¹ and J. Wieser²

¹ Physik Department E12, Technische Universität München, James-Franck-Str. 1, 85748 Garching, Germany
² Coherent GmbH, Zielstatt-Str. 32, 81379 München, Germany

andreas.ulrich@ph.tum.de

Received: 11 December 2008 / Accepted: 21 January 2009 / Published online: 17 April 2009

Abstract
Electron beams with a particle energy of typically 12 keV are used for collisional excitation of dense gases. The electrons are sent through ceramic membranes of only 300 nm thickness into gas targets. Excimer light emission from the pure rare gases and from gas mixtures are studied for the development of brilliant VUV and UV light sources. The application of the technology for gas kinetic studies is described and its potential for building very small electron beam pumped lasers is discussed.

PACS
42.55.Lt - Gas lasers including excimer and metal-vapor lasers.
34.50.Fa - Electronic excitation and ionization of atoms.
33.20.Ni - Vacuum ultraviolet spectra.

© EDP Sciences 2009

What is OpenURL?

The OpenURL standard is a protocol for transmission of metadata describing the resource that you wish to access. An OpenURL link contains article metadata and directs it to the OpenURL server of your choice. The OpenURL server can provide access to the resource and also offer complementary services (specific search engine, export of references...). The OpenURL link can be generated by different means.

If your librarian has set up your subscription with an OpenURL resolver, OpenURL links appear automatically on the abstract pages.
You can define your own OpenURL resolver with your EDPS Account. In this case your choice will be given priority over that of your library.
You can use an add-on for your browser (Firefox or I.E.) to display OpenURL links on a page (see http://www.openly.com/openurlref/). You should disable this module if you wish to use the OpenURL server that you or your library have defined.