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Eur. Phys. J. Appl. Phys. 46, 20501 (2009)
DOI: 10.1051/epjap/2009053
Pulsed laser deposition of bismuth telluride thin film and annealing effects
L.S. Faraji, R.P. Singh and M. AllahkaramiSchool of Mechanical and Aerospace Engineering, Helmerich Advanced Technology Research Center, Oklahoma State University, 700N Greenwood Ave, Tulsa, OK 74106, USA
leila.seyedfaraji@okstate.edu
Received: 3 December 2008 / Received in final form: 14 February 2009 / Accepted: 19 February 2009 / Published online: 1st April 2009
Abstract
Pulsed laser deposition method was used to prepare Bi2Te3
thermoelectric thin films on a soda lime glass substrate at room
temperature. Surface morphology of Bi2Te3 thin films was studied
by AFM (atomic force microscopy) images. The influence of thermal annealing
in vacuum condition on microstructure and surface morphology of films was
investigated in wide range of temperature. The results demonstrate that
annealing induces a transition from amorphous to polycrystalline structures
and increases electrical conductivity. X-ray diffraction analysis proves
that the film annealed at 300 °C for 120 min appears in large grain size
polycrystalline structure but film annealed at 400 °C in the same
condition has a preformed crystal growth texture in (006) direction.
61.05.-a - Techniques for structure determination.
85.30.De - Semiconductor-device characterization, design, and modeling.
61.05.cp - X-ray diffraction.
68.37.Ps - Atomic force microscopy (AFM).
© EDP Sciences 2009
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