Dynamic study of a field emission sensor based on carbon nanotubes for acceleration and high frequency vibration sensing
Nano-Physics Research Laboratory, Department of Physics, University of Tehran, Tehran, Iran
Accepted: 16 May 2011
Published online: 21 July 2011
Plasma enhanced chemical vapor deposition was used to grow vertically aligned carbon nanotubes (CNTs) on silicon substrate. Field emission from these nanotubes was realized and used to fabricate a field emission-based sensor. Titanium dioxide was used as spacing layer between the emitters and a flexible anode made of silicon membrane. The variation of the emission current during mechanical vibration of the silicon membrane was measured and compared with a theoretical prediction. Experimental results show that field emission from CNTs is a good candidate for high frequency vibration sensing, measurement of resonance frequency, fabrication of accelerometer and other types of mechanical sensors. The fabricated device, due to a low distance between its electron emitters and the anode, works at low voltages with high emission current.
© EDP Sciences, 2011