Enhanced light extraction from InGaN/GaN-based light emitting diodes epistructure with ICP-etched nanoisland GaN:Mg surface
State Key Lab. of Crystal Materials, Shandong University, Shanda South
Road 27, 250100, Jinan, P.R. China
2 Shandong Huaguang Optoelectronics Company, Ltd., Tianchen Road 1835, 250101, Jinan, P.R. China
Accepted: 8 January 2010
Published online: 26 February 2010
A simple and effective method is presented to fabricate surface-roughened InGaN/GaN-based light emitting diodes (LEDs) epistructure using annealing-formed, random-distributed Au particle arrays as dry etching mask. The shapes of GaN nanoislands, with horizontal diameters of 100–500 nm and vertical depths up to 140 nm, are determined by Au mask particles. Importantly, this roughened surface exhibits strong photoluminescence (PL) light-output enhancement by a factor of more than 1.6 orders of magnitude. This method will put forward new promising applications in the electroluminescent devices, especially in solid state lighting.
© EDP Sciences, 2010