16th International Colloquium on Plasma Processes (CIP 2007)
Issue
Eur. Phys. J. Appl. Phys.
Volume 42, Number 1, April 2008
16th International Colloquium on Plasma Processes (CIP 2007)
Page(s) 3 - 8
Section Microelectronics and Optoelectronics
DOI http://dx.doi.org/10.1051/epjap:2008038
Published online 28 March 2008

© EDP Sciences, 2008

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