Analysis of particulates generated in a radiofrequency methane plasma by laser light scattering and optical spectroscopy
des Sciences, Université d'Orléans, site de Bourges, rue G.
Berger, B.P. 4043, 18028 Bourges Cedex, France
Corresponding author: Isabelle.Geraud@bourges.univ-orleans.fr
Revised: 8 July 1999
Accepted: 27 July 1999
Published online: 15 October 1999
The generation and the behavior of amorphous hydrogenated carbon particulates have been investigated in a pure methane low pressure radiofrequency discharge at 13.56 MHz. In the plasma, the formation and the presence of two kinds of particulates have been evidenced by use of laser light scattering. The study of the different forces acting on the particulates allowed us to understand their behavior in the discharge. Optical emission measurements have enabled us to correlate the evolutions of the emission lines (CH, Hα and H2) with the growth of amorphous hydrogenated carbon particulates and also with the results obtained by laser light scattering. The particulate sizes have been measured and a particulate number density of about 3.0 × 106 cm−3 has been determined.
PACS: 52.25.Rv – Emission, absorption, and scattering of visible and infrared radiation / 61.46.+w – Clusters, nanoparticles, and nanocrystalline materials / 81.20.Ev – Powder processing: powder metallurgy, compaction, sintering, mechanical alloying, and granulation
© EDP Sciences, 1999