Topical Issue International Symposium on Flexible Organic Electronics (IS-FOE)

OVPD^® technology

N. Meyer^a1, M. Rusu^a2, S. Wiesner^a2, S. Hartmann^a3, D. Keiper^a1, M. Schwambera^a1, M. Gersdorff^a1, M. Kunat^a1, M. Heuken^a1, W. Kowalsky^a3 and M. Ch. Lux-Steiner^a2

AIXTRON AG, Kackertstr. 15-17, 52072 Aachen, Germany

Solarenergieforschung (SE2), Helmholtz-Zentrum Berlin für Materialien und Energie, Germany

TU Braunschweig, Schleinitzstraße 22, 38106 Braunschweig, Germany

Abstract

The precise control of organic thin film processing by organic vapor phase deposition (OVPD^®) is presented and analyzed on device level. OVPD^® offers accurate and individual control of deposition layer properties like mixing of several materials (co-deposition) and the control of various morphologies by a wide process parameter space given by, e.g. substrate temperature, deposition rate and pressure. The benefit of precise co-deposition is demonstrated by an OLED with a sensitive twofold-doped emissive layer and revealed a doping level of 0.26% for the red dopant with a std. dev. of 0.38%. The effect of the various morphologies is investigated by optimizing the efficiency of molecular organic solar cells consisting of copper phthalocyanine (CuPc) and C₆₀. With defined process parameters efficiencies of up to 3.0% were demonstrated.

(Received October 20 2008)

(Accepted January 23 2009)

(Online publication March 27 2009)

PACS:

• 78.66.Qn – Polymers; organic compounds;
• 84.60.Jt – Photoelectric conversion: solar cells and arrays;
• 72.80.Le – Polymers; organic compounds

Meyer@aixtron.com