AIXTRON AG, Kackertstr. 15-17, 52072 Aachen, Germany
Solarenergieforschung (SE2), Helmholtz-Zentrum Berlin für Materialien und Energie, Germany
TU Braunschweig, Schleinitzstraße 22, 38106 Braunschweig, Germany
The precise control of organic thin film processing by organic vapor phase deposition (OVPD®) is presented and analyzed on device level. OVPD® offers accurate and individual control of deposition layer properties like mixing of several materials (co-deposition) and the control of various morphologies by a wide process parameter space given by, e.g. substrate temperature, deposition rate and pressure. The benefit of precise co-deposition is demonstrated by an OLED with a sensitive twofold-doped emissive layer and revealed a doping level of 0.26% for the red dopant with a std. dev. of 0.38%. The effect of the various morphologies is investigated by optimizing the efficiency of molecular organic solar cells consisting of copper phthalocyanine (CuPc) and C60. With defined process parameters efficiencies of up to 3.0% were demonstrated.
(Received October 20 2008)
(Accepted January 23 2009)
(Online publication March 27 2009)